E-beam Coating System
E-beam Coating System
电子束镀膜系统 (E-beam)
- AF Coating System
- AR & Multilayer Coating System
- E-beam Coating System
- PVD (Ceramics) Coating System
- PVD (Al) Coating System
- Spray AF Coating System
- AF Coating System
- AR & Multilayer Coating System
- E-beam Coating System
- PVD (Ceramics) Coating System
- PVD (Al) Coating System
- Spray AF Coating System
본 설비는 E-beam, Ion beam방식으로 글라스,필름,커버, 렌즈 등 제품표면에 AF코팅 ,AR코팅, 멀티코팅(칼라코팅) 이 가능한 설비 입니다.
This equipment enables AF, AR, and multi-color coatings on the surfaces of products such as glass, film, back shells, and lenses using E-beam and Ion beam technologies.
本设备是在产品表面上通过E-beam, Ion beam方式 玻璃, 菲林, 后壳, 镜头产品上 镀 AF膜, AR膜, 颜色膜的设备.
Application
스마트폰 커버 글라스 ,필름, 커버, 카메라 렌즈 등 제품 표면에 AF,AR, 칼라 코팅 가능
Capable of AF (anti-fingerprint), AR (anti-reflection), color, and other coatings on Smartphone cover glass, films, rear cases, and camera lenses.
在智能手机盖板玻璃, 菲林, 后壳, 眼镜镜头，相机镜头等产品上进行耐指纹(AF), 抗反射(AR), 着色(Color)等镀膜
Features
- E/Beam고온 물질 용해 가능하여 금속 또는 화합물을 쉽게 증착 가능
- Ion Beam은 증착 보조, 소재 표면 세척 가능(수분,이물질)
- 박막 두께는 크리스탈 센서로 컨트롤하고 안정적인 박막을 구현
- 공정 중 마스크로 균일성과 편차를 컨트롤 가능
- E-beam enables melting of high-temperature materials and the easy deposition of metals and compounds.
- Ion beam assists deposition and cleans the substrate surface by removing moisture and contaminants.
- Deposition thickness can be precisely controlled using a crystal oscillation thickness meter.
- During the process, a uniformity mask is used to control film uniformity and minimize thickness variations caused by coating materials.
- 电子枪(E/Beam)容易融化高温物质，金属及金属化合物上容易镀膜.
- 离子束可辅助镀膜, 并可清洗基板(污染物，水分).
- 膜厚厚度使用晶体振荡器来调节, 膜厚控制容易可实现稳定的薄膜.
- 工程中膜厚调节通过使用Uniformity Maskl来降低已使用药丸的偏差
Spec
| Description | Spec. | Etc. | |
|---|---|---|---|
| BODY | Vacuum Chamber | Φ2700×1850H(SUS304) | |
| Evaporate module | Electron beam & Ion beam | ||
| Planetary jig module | Dome Type | ||
| VACUUM PUMP | Oil diffusion pump | 36”, 2Set | 6.5×10-5 torr ↓ |
| Oil rotary & booster pump | NES750 & EH4200 | ||
| Control System | AUTO Mode | ||
| OPTION | Chiller | 25RT | |
| Poly cold | 100,000ℓ/sec | ||
| Floor Area | L7,600×D7,000×H3,500 | Weight / 15.0t | |